GETTING MY SIC SCHOTTKY BARRIER DIODES TO WORK

PiN diodes fabricated over a proton-implanted wafer present existing–voltage features similar to People of PiN diodes with out proton implantation. In distinction, the enlargement of 1SSFs is efficiently suppressed in PiN diodes with proton implantation. Consequently, proton implantation into 4H-SiC epitaxial wafers is a good method for suppressi